RCA Clean (SC1-SC2)
| Process Steps | Process Flow | Process Details | |
| 1 | RCA Clean | SC1 + SC2 @ 50C for 20′ (each bath) | |
| 2 | Rinse/SRD | DI H2O for 20′; Standard SRD | |
| 3 | Visual Inspection | 100% Visual |
RCA:
SC1 chemical Ratio: 40:1:1
DI Water (40 Parts), Hydrogen Peroxide (1 Part), Ammonia Hydroxide (1 Part)
SC2 Chemical Ratio: 160:4:1
DI Water (160 Parts), Hydrogen Peroxide (4 Parts), Hydrochloric (1 Part)
