NOEL Tech Processes
Process Data Sheets
Contact Printing 1:1 Stepper Lithography Photoresist TableI–Line Positive Photoresist:
365nm #220-3 Blanket Coating 365nm #220-7 Blanket Coating 365nm #3012 Blanket Coating 365nm #660 Blanket CoatingDUV Photoresist:
193nm Blanket Coating 248nm 210-03 Blanket Coating 248nm UV6-1.2 Blanket Coating
Lithography
Noel Technologies’ in-house Lithography services include engineering support for mask layout, process development, insuring success of each design. Our experienced technical group can cost effectively solve many problems.
Tool sets include two steppers, contact printing, SEM Analysis, Profiler, Alpha Step, Thin Film Mapping, as well as multiple wet etch chemistry’s and a Plasma Etch System.
Contact our Marketing Group for an initial review of your project.
Blanket Photo Resist Coatings
Noel offers a number of resist types and thicknesses as blanket coatings for equipment tests. Wafer diameter ranges from 300mm to 100mm as well as non-standard substrate sizes. All resist types are qualified and measured for film thickness and uniformity via a film mapping system.
