NOEL Tech Capabilities

INDUSTRY & APPLICATIONS	PROCESSES
	Lithography Services	Films, LPCVD, PECVD, Metal	Wet Etch & Clean Processes	Wafer Recovery, Reclaim, Kiss Polish & CMP
Process Data Sheets	Contact Printing 1:1 Stepper Lithography Photoresist Table I–Line Positive Photoresist: 365nm #220-3 Blanket Coating 365nm #220-7 Blanket Coating 365nm #3012 Blanket Coating 365nm #660 Blanket Coating DUV Photoresist: 193nm Blanket Coating 248nm 210-03 Blanket Coating 248nm UV6-1.2 Blanket Coating	Thermal Oxide Process LPCVD Process PECVD Process: Amorphous PECVD Process: Enhanced PVD Services	10:1 HF 100:1 HF 7:1 BOE Etch Low Particle Clean RCA Clean SC1 - SC2 Wet Chemical Etch Table	Wafer Reclaim Specification
Industry Specific Capabilities
	Lithography Services	Films, LPCVD, PECVD, Metal	Wet Etch & Clean Processes	Wafer Recovery, Reclaim, Kiss Polish & CMP
Semiconductor Process	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP
Foundry Services	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP
Solar Processing	Litho	Thin Films	Wet Etch
Medical Anaylsis
Silicon on Glass	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP
Bonded Wafers	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP
Metrology	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP
Product Specific Capabilities
Wafer Diameter	Lithography Services	Films, LPCVD, PECVD, Metal	Wet Etch & Clean Processes	Wafer Recovery, Reclaim, Kiss Polish & CMP
300mm	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP
200mm	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP
150mm	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP
100mm	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP
50mm	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP
Pseudo Squares	Litho	Thin Films	Wet Etch	Wafer Recovery : Kiss Polish : CMP

NOEL Tech Capabilities

Contact Information